X0508 4 2026-02-24 0 0001101302 ENTEGRIS INC ENTG 0001197452 LOY BERTRAND C/O ENTEGRIS, INC. 129 CONCORD ROAD BILLERICA MA 01821 1 1 0 0 Executive Chair 1 Common Stock 2026-02-24 4 M 0 9838 98.11 A 327605 D Common Stock 2026-02-24 4 S 0 6955 140.49 D 320650 D Common Stock 2026-02-24 4 S 0 2783 141.45 D 317867 D Common Stock 2026-02-24 4 S 0 100 142.19 D 317767 D Common Stock 2026-02-24 4 S 0 47611 138.57 D 270156 D Common Stock 2026-02-24 4 S 0 2067 139.14 D 268089 D Common Stock 2026-02-25 4 S 0 46522 137.32 D 221567 D Common Stock 2026-02-25 4 S 0 3800 138.57 D 217767 D Employee Stock Option (Right to Buy) 98.11 2026-02-24 4 M 0 9838 D 2028-02-19 Common Stock 9838 61534 D These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 10, 2025. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $140.00 to $140.98, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $141.13 to $142.09, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $138.00 to $138.99, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $139.02 to $139.28, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $137.05 to $137.63, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $138.10 to $138.97, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. This option is fully vested. Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee. /s/ Joseph Colella, Attorney-In-Fact for Bertrand Loy 2026-02-26