X0508 4 2026-02-12 0 0001101302 ENTEGRIS INC ENTG 0001630039 Woodland Daniel D. C/O ENTEGRIS, INC. 129 CONCORD ROAD BILLERICA MA 01821 0 1 0 0 SVP & President, MS Division 0 Common Stock 2026-02-12 4 A 0 10694 0 A 46903.83 D Common Stock 2026-02-12 4 M 0 5151 55.88 A 52054.83 D Common Stock 2026-02-12 4 S 0 5151 130.80 D 46903.83 D Common Stock 2026-02-12 4 M 0 12656 70.03 A 59559.83 D Common Stock 2026-02-12 4 S 0 12656 130.71 D 46903.83 D Common Stock 2026-02-12 4 M 0 12667 79.97 A 59570.83 D Common Stock 2026-02-12 4 S 0 12667 130.52 D 46903.83 D Employee Stock Option (Right to Buy) 55.88 2026-02-12 4 M 0 5151 0 D 2028-12-06 Common Stock 5151 0 D Employee Stock Option (Right to Buy) 70.03 2026-02-12 4 M 0 12656 0 D 2029-12-05 Common Stock 12656 0 D Employee Stock Option (Right to Buy) 79.97 2026-02-12 4 M 0 12667 0 D 2030-12-03 Common Stock 12667 0 D These shares are restricted stock units with restrictions that lapse over a two-year period with respect to 50% of these shares per year, on February 19, 2027 and February 19, 2028. Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee. These shares include 121.09 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan on December 31, 2025. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $130.70 to $130.87, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $130.46 to $130.66, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. This option is fully vested. /s/ Joseph Colella, Attorney-In-Fact for Daniel D. Woodland 2026-02-17