X0508 4 2026-02-02 0 0001101302 ENTEGRIS INC ENTG 0001197452 LOY BERTRAND C/O ENTEGRIS, INC. 129 CONCORD ROAD BILLERICA MA 01821 1 1 0 0 Executive Chair 1 Common Stock 2026-02-02 4 M 0 65250 55.72 A 371672 D Common Stock 2026-02-02 4 S 0 200 115.96 D 371472 D Common Stock 2026-02-02 4 S 0 2412 117.19 D 369060 D Common Stock 2026-02-02 4 S 0 9292 118.43 D 359768 D Common Stock 2026-02-02 4 S 0 16424 119.13 D 343344 D Common Stock 2026-02-02 4 S 0 34522 120.25 D 308822 D Common Stock 2026-02-02 4 S 0 2400 120.91 D 306422 D Employee Stock Option (Right to Buy) 55.72 2026-02-02 4 M 0 65250 D 2027-02-19 Common Stock 65250 0 D This amount reflects an additional 602 shares to correct an error in the number of shares initially withheld to satisfy tax obligations in connection with the award of shares reported on the Reporting Person's Form 4 filed on February 24, 2025. These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 10, 2025. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $115.50 to $116.42, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $116.60 to $117.58, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $117.67 to $118.66, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $118.68 to $119.66, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $119.73 to $120.72, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $120.73 to $121.21, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. This option is fully vested. Awarded pursuant to the Entegris, Inc. 2010 Stock Plan in consideration of services as an employee. The stock option, which was exercised by the Reporting Person pursuant to a Rule 10b5-1 Trading Plan, was set to expire on February 19, 2027. /s/ Joseph Colella, Attorney-In-Fact for Bertrand Loy 2026-02-04